#
# Simulation to 'simulate' SRP 
# -- code: Michael Duane/AMD.
# 
# Load this file in 'deckbuild' to run this simulation. 
#
# CM 6/23/95

go athena

line x loc=0 spac=.1
line x loc=.1 spac=.1

line y loc=0   spac=.03
line y loc=1.2 spac=.01
line y loc=3   spac=.03

init silicon c.boron=1.0e15 orientation=100
implant phos dose=5e12 energy=100
depo oxide thick=.0200

diff temp=1100 time=100

extract name="sims" curve(depth,abs(net silicon mat.occ=1)) outfile="sims.dat"
extract name="srp" curve(depth,abs(srp silicon mat.occ=1)) outfile="srp.dat"

tonyplot  sims.dat srp.dat
# make overlay, then plot/display; y scale=log; select net and srp

etch above p1.y=1

extract name="sims" curve(depth,abs(net silicon mat.occ=1)) outfile="sims1.dat"
extract name="srp" curve(depth,abs(srp silicon mat.occ=1)) outfile="srp1.dat"

tonyplot  sims1.dat srp1.dat